| Title |
A Design and Simulation of MEMS Six-axis Force-torque Sensor using Capacitance Differential Configuration |
| DOI |
https://doi.org/10.5573/ieie.2023.60.6.15 |
| Keywords |
Force/torque sensor; MEMS; Capacitive; Differential; Multi-axis |
| Abstract |
A capacitive MEMS sensor capable of measuring 6-axis force-torque is proposed. A combination of electrodes perpendicular to the surface of the substrate was used, and the fixed electrode and the moving electrode composed an interdigitated comb electrode structure. The distance between two adjacent electrodes can be set differently and the change in this value can be used to measure movement and rotation within the surface plane. The out-of-plane movement and rotation were measured using the change in the overlapping area of ??two electrodes with different heights. A sensor capable of measuring both the amount and the direction of movement was implemented by combining two capacitors to have opposite amounts of change and processing the signals in a differential manner. Using this mechanism, it is possible to manufacture a sensor that is small in size, consumes less power, and can measure all 6-axis force-torque, and is expected to be applied to responsive robots, human interfaces, and inertial measurement devices. |