| Title |
Research on Design Technology to Minimize Signal Distortion of Probe Card with Many Branches |
| Authors |
강성준(Sung-Jun Kang) ; 나완수(Wan-Soo Nah) |
| DOI |
https://doi.org/10.5573/ieie.2023.60.9.13 |
| Keywords |
Signal integrity; Characteristic impedance; Probe card; Memory test; Channel sharing |
| Abstract |
Probe cards used in recent wafer tests increase productivity by decreasing the test time. Several devices under test are investigated simultaneously by expanding the tester’s channel. At this time, the function of expanding the channel of the tester was performed on the probe card. The signal path of the probe card is divided into parallel forms, causing several signal distortion problems. Therefore, there is a need to develop a design method for minimizing signal loss and distortion in the probe card, a tool for channel expansion. The probe card is a device in which several multilayer substrates are assembled. In this study, the structure of the stripline, typically used in multilayer substrates, was modified to reduce the load effectively. The signal paths, divided into 16, were configured in the most efficient form. This branch type can be applied even if the structure and components of the probe card are changed in the future. Finally, the research results were verified based on the design and production of a 16-channel expansion probe card. |