| Title |
Model Identification of Heating Jacket with Heat Loss Characteristics and Verification through Temperature Experiment |
| DOI |
https://doi.org/10.5573/ieie.2023.60.12.72 |
| Keywords |
Heating jacket; Heat loss; Model identification; PID algorithm; Temperature control |
| Abstract |
In this paper, we present a theoretical model of a heating jacket with heat loss characteristics and verify model identification through temperature experiments. In semiconductor processing facilities, a heating jacket that maintains a constant temperature of the raw material gas delivery path is used in the experiment. The model equation was expanded by additionally introducing temperature change due to the heating element to the existing model that describes the relationship between heat loss rate and temperature change. It also suggests that the control target can be accurately described by defining constants for heat capacity and heat loss rate in the model equation. The results of the temperature simulation using this model were consistent with the actual temperature experiment, proving that the theoretical model was accurate. General-purpose temperature controllers use the PID algorithm. This was because control stability was excellent and performance was reliable even if the modeling process of the control object was omitted and replaced with PID tuning. However, in reality, PID tuning is often impossible and even when variables affecting control change in real time, PID tuning can be performed virtually using the model and simulation proposed in this paper, making it effective. |