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Title Analysis of Moire Pattern and Sample Displacement Tracking using Ultra-high Resolution Pixel Shift Camera
Authors 문동민(Dongmin Moon) ; 김영솔(Phillip Kim) ; 박경덕(Bryan Park)
DOI https://doi.org/10.5573/ieie.2024.61.6.82
Page pp.82-86
ISSN 2287-5026
Keywords Moire pattern; Pixelshift; Vieworks; OLED; Camera
Abstract This study, which explored the efficiency of the moire pattern analysis technique that can realize high-resolution image analysis with a low-resolution camera, verifies its possibility, especially in the field of displacement measurement and tracking. A new approach that can accurately calculate physical displacements through moire pattern analysis and accurately track even microscopic displacements of samples using an ultra-high-resolution pixel shift camera is presented based on this. This method, which is beyond the limitations of existing mechanical means of transportation, can achieve the high precision and high-speed reactivity required in the manufacturing process of semiconductors and displays, which is expected to improve production efficiency and product quality. This paper explores the principle, implementation, and practical application of these technologies.