| Title |
Analysis using Modeling and FEM Simulation to Predict the Maximum Displacement of a Cantilever with Residual Stress |
| Authors |
박동출(Dong-Chul Park) ; 김용권(Yong-Kweon Kim) |
| DOI |
https://doi.org/10.5573/ieie.2025.62.8.87 |
| Keywords |
Cantilever; Residual stress; FEM modeling; Thermal expansion; O2 plasma ashing |
| Abstract |
This study presents a modeling and finite element method (FEM) simulation to predict the maximum out-of-plane displacement of a cantilever structure with residual stress. Experimental validation was conducted by comparing displacement measurements obtained using an optical profiler and surface step analysis with the simulation results. Residual stress, induced by differences in the thermal expansion coefficients of the deposited aluminum thin film and sacrificial photoresist layer, plays a critical role in the deformation process. Additionally, variations in local etching rates during oxygen plasma ashing were found to affect displacement uniformity. The deformation mechanism was systematically analyzed through combined FEM simulation and experimental observation. |