| Title |
Signal Integrity Analysis of Multi-branch Transmission Lines in the Multi-Layer Ceramic of a Probe Card Using Factorial Design of Experiments |
| Authors |
김영재(Youngjae Kim) ; 김문정(Moonjung Kim) ; 장아랑(A-Rang Jang) |
| DOI |
https://doi.org/10.5573/ieie.2026.63.8.40 |
| Keywords |
Probe card; Multi-layer ceramic; Multi-branch transmission lines; Signal integrity; Design of experiments |
| Abstract |
This paper analyzes how the characteristic impedance and length of line segments affect the receiver-end Eye hold time in a Multi-Layer Ceramic 16-branch transmission-line of a probe card for highly parallel wafer testing. Circuit, 2.5D and 3D EM simulations were performed stepwise with prototype S-parameter measurement. Design conditions followed a full-factorial DOE, and ANOVA evaluated the significance and contribution of each variable. Circuit simulation identified the dominant factors and effect directions, narrowing the design range. 2.5D EM analysis then reassessed the contributions including parasitic and coupling effects, and 3D EM analysis on the top candidates selected the final design via Eye hold time comparison. Prototype measurement on a representative path showed a frequency response consistent with the 3D EM result, confirming that DOE-based design space reduction with EM analysis identifies the dominant design factors of probe card multi-branch transmission lines. |