| Title |
The Feasibility Study of CMP Wastewater Treatment Using Tubular Membrane and Coagulants |
| Authors |
정호찬 ( Ho Chan Jung ) ; 정철중 ( Cheol Joong Jung ) ; 송자연 ( Ja Yeon Song ) ; 김연국 ( Youn Kook Kim ) ; 이선용 ( Sun Yong Lee ) |
| Keywords |
CMP wastewater; Coagulant; Semiconductor wastewater; Tubular membrane; Wastewater; Treatment |
| Abstract |
The purpose of this study is to identify the possibility of the CMP wastewater treatment from semiconductor fabrication under operating tubular membrane with coagulants. To find suitable coagulants treating CMP wastewater, we conducted Jar-test. After Jar-test experiments suitable coagulants are PAC(17%), Ca(OH)2 and optimum coagulant dosage is PAC(17%) 10mg/L, Ca(OH)2 110~120mg/L. Based on these results, the tubular membrane was applied to CMP wastewater, the turbidity removal efficiency is Ca(OH)2 > PAC(17%) > Nothing. The fast cross-flow velocity and backwash process what are operating characteristics of tubular membrane can be stable CMP wastewater treatment. But when the coagulant and tubular membrane are used at the same time, the withdraw and treatment of the CMP wastewater are possibile. However further treatment process needs if treated water will be used for semiconductor fabrications. |