| Title |
A Study on the Control and Estimation of Gap Sensor Offset in High-Precision Magnetic Levitation Transport System |
| Authors |
김민(Min Kim) ; 김창현(Chang-Hyun Kim) ; 하창완(Chang-Wan Ha) ; 원문철(Mooncheol Won) |
| DOI |
http://doi.org/10.5370/KIEE.2018.67.1.87 |
| Keywords |
High-precision magnetic levitation transport system ; OLED ; Gap sensor |
| Abstract |
The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation. |