• 대한전기학회
Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
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Title The fabrication and properties of {YBa}_{2}{Cu}_{3}{O}_{7-x} thin films by laser ablation
Authors 이덕출 ; 최충석
Page pp.1063-1067
ISSN 1975-8359
Keywords 레이저 어브레이션 ; 산소분압 Laser Ablation ; Oxygen Partial Pressure
Abstract The superconducting properties of YBa_{2}Cu_{3}O_{7-x}(YBaCuO) thin films prepared by laser ablation have been investigated. The x-ray diffraction patterns and surface morphology of the films were substantially different from one another. The compositional ratios of YBaCuO films were controlled by the conditions of the target-substrate distance. The YBaCuO films manufactured on MgO(100) substrate were indicated T_{c}(zero)=91.2 K, T_{c}(onset)=93 K, and J_{c}=3.5*10^{5} A/cm^{2}(at 77.3K). The optimum conditions were found to be a substrate temperature of 710 .deg. C, a energy density of 2 J/cm^{2}, and a target-substrate distance of 60 mm in an oxygen partial pressure of 200 mTorr.0 mTorr.