| Title |
Application of Low-hydrogenated Diamond-like Carbon Film to Mo-tip Field Emitter Array |
| Authors |
주병권(Ju, Byeong-Kwon) ; 정재훈(Jung, Jae-Hoon) ; 김훈(Lee, Yun-Hi) ; 이윤희(Kim, Hoon) ; 오명환(Oh, Myung-Hwan) |
| Keywords |
FED(fieldemission display) ; Mo-tip FEA(field emitter array) ; DLC(diamond-like carbon) ; layer-by-layer process |
| Abstract |
Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity. |