| Title |
Field Control Type Electrostatic Charge Neutralizer |
| Authors |
정석환(Jeong, Seok-Hwan) ; 이대희(Lee, Dae-Hui) ; 문재덕(Mun, Jae-Deok) |
| Keywords |
static electricity ; neutralizer ; third electrode ; electric field ; ion |
| Abstract |
Methods and systems to remove static electricity are requested in the field of industry because the static electricity causes a flammable gas explosion or fire and a reduction of production rate in manufacturing semiconductor devices and so on. This paper is a basic study about a new structure of electrode system to control the quantities of generated ions and to solve the problem of dust attachment to needle electrode. In addition, a new type field controlled electrostatic charge neutralizer was proposed, and it could control the electric field in the end of the needle electrode by controlling the voltage of the third electrode around the tip of the needle electrode. As aresult, it was possible to control the quantities of generated ion by controlling the electric field in the needle electrode with the third electrode, which shows the possibilities to solve the nonequilibrium of generated ions in ac power source and the problem of the dust in the needle electrode. |