| Title |
Smart Actuators Composed of Piezoelectric Ceramics and Highly Magnetostrictive films |
| Authors |
신광호(Sin, Gwang-Ho) ; Arai, Ken-Ichi(Arai, Ken-Ichi) ; Sa-Gong, Geon(Sa-Gong, Geon) |
| Keywords |
Magnetostrictive film ; Strain sensitivity ; Piezoelectric substrate ; Smart actuator |
| Abstract |
This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator. |