| Title |
Development of Ultra-Clean Aligning/Mounting Process of FED Spacers using Electrostatic Bonding |
| Authors |
주병권(Ju, Byeong-Kwon) ; 강문식(Kang, Moon-Sik) ; 이윤희(Lee, Yun-Hi) |
| Keywords |
FED spacer ; spacer alignment ; spacer bonding ; electrostatic bonding |
| Abstract |
In this paper, a new idea about ultra-clean aligning and mounting method of FED spacers was introduced. The glass-to -glass electrostatic bonding process was employed in order to bond the micro-structures of spacers to black matrix area formed on an FED anode substrate. It is possible to get adhesive-free bonding interface and well-aligned spacer array on an FED anode substrate with a pm5μm accuracy. Finally, I inch-sized FED panel was demonstrated to make sure of its applicability to FED panel fabrication. |