| Title |
Microstructure and Properties of (Sr_{1-x}Ca_x)TiO_3Ceramic Thin film |
| Authors |
김진사(Kim, Jin-Sa) ; 이준웅(Lee, Jun-Ung) |
| Keywords |
Thin film ; Deposition temperature ; Dielectric relaxation ; Leakage current |
| Abstract |
The(Sr_{1-x}Ca_x)TiO_3(SCT) thin films are deposited on Pt-coated electrode (Pt-TiN /SiO_2Si) using RF sputtering method at various deposition temperature. The crystallinity of thin films was increased with increased of deposition temperature n the temperature range of 200~500 [°C]. The capacitance changes almost linearly in temperature ranges of -80~+90[°C]. All SCT thin films used in the study the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz]. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature. |