| Title |
Air Damping Evaluation for Laterally Driven Electrostatic Repulsive-Force Microactuators Using Creeping Flow Model |
| Authors |
이기방(Lee, Gi-Bang) ; 서영호(Seo, Yeong-Ho) ; 조영호(Jo, Yeong-Ho) |
| Keywords |
Repulsive ; Microactuator ; Frequency tuning ; Quality-factor control ; Creeping flow |
| Abstract |
This paper presents theoretical and experimental study on the quality-factor of the laterally oscillated electrostatic microactuator, driven by a lateral repulsive-force generated by the asymmetry of planar electric field. The quality-factor of the repulsive-force microactuator using a creeping flow model of the ambient air is evaluated. By filling the simulation results of damping force, we evaluate the dimensionless damping force, α, thereby obtaining an analytical damping force, F, in the form of F=μ αUL, where μ, U and L denote the air viscosity, the velocity and the characteristic length of the movable electrodes. The measured quality-factor increases from 12 to 13 for the DC bias voltage increased from 60V to 140v. The theoretical quality-factor estimated from the creeping flow model increases from 14.9 to 18.7. Characteristics of quality-factor of the repulsive-force microactuator have been discussed and compared with those of the conventional attractive-force microactuator. |