| Title |
Characteristics of CU(InGa)Se_2Thin Film Solar Cells with Deposition Condition of Mo Electrode |
| Authors |
김석기(Kim, Seok-Gi) ; 한상옥(Han, Sang-Ok) |
| Keywords |
Mo film ; CU(InGa)Se_2film ; Stress ; d.c magnetron sputtering |
| Abstract |
Molybdenum thin films were deposited on the soda lime glass(SLG) substrates by direct-current planar magnetron sputtering, with a sputtering power density of 4.44W/cm^2. The working pressure was varied from 0.5 mtorr to 20 mtorr to gain a better understanding of the effect of sputtering pressure on the morphology and microstructure of the Mo film. Thin films of CU(InGa)Se_2 (CIGS) were deposited on the Mo-coated glass by three stage co-evaporation process. The highest efficiency device was obtained at the maximum value of the tensive stress. The morphology of Mo-coated films were examined by using scanning electron microscopy The film's microstructure, such as the preferred orientation, the full width at half-maximum(FWHM), and the residual intrinsic stress were examined by X-ray diffraction. |