| Title |
Analysis of Initial Stage of Copper Electrodeposition for Fine Pattern |
| Keywords |
Nucleation ; Electrodeposition ; EIS ; Surface oxidation ; Fume |
| Abstract |
The initial stage of copper electrodeposition has been known to be very important role for morphology and physical properties after final growth. The factors affecting the nucleation are electrode, current density, electrolyte and temperature. Current studies has illuminated the initial nucleation of copper electrodeposition in the viewpoint of the surface status of electrode and analyzed using EIS and SEM observation |