| Title |
Effects of Thermal Treatment on Structural Properties of DLC Films Deposited by FCVA Method |
| Authors |
김영도 ; 장석모 ; 박창균 ; 엄현석 ; 박진석 |
| Keywords |
Raman 분광법 DLC ; FCVA ; XPS |
| Abstract |
Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at 600°C for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I_{D}I_{G} intensity ratio, sp^3 hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp^3 fraction and the increase of I_{D}I_{G} intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp^3 fraction) of as-deposited film.ed film. |