| Title |
Comparison of Models and Numerical Analysis Methods in Fluid Simulation of High Density Inductively Coupled Plasma Sources |
| Keywords |
경계 조건 ; 수송 ; 유체 Plasma ; Simulation |
| Abstract |
Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme［l］ Comparing the exactness, the numerical stability and the efficiency of the various models. the most adoptable model is suggested. |