| Title |
Diagnostics of Inductively Coupled BCl_3/Ar Plasma Characteristics Using Quadrupole Mass Spectrometer |
| Authors |
김관하(Kim, Gwan-Ha) ; 김창일(Kim, Chang-Il) |
| Keywords |
Plasma Diagnostics ; QMS ; EEDF ; ICP ; Ar/BCl_3 |
| Abstract |
In this study, we investigated the ion energy distributions in a chlorine based inductively coupled plasma by quadrupole mass spectrometer with an electrostatic ion energy analyzer. Ion energy distributions are presented for various plasma parameters such as BCl_3/Ar gas mixing ratio, RF power, and process pressure. As the BCl_3/Ar gas mixing ratio and process pressure decreases, and RF power increases, the saddle-shaped structures is enhanced. The reason is that there are ionized energy difference between BCl_3 and Ar, change of plasma potential, alteration of mean free path. and variety of ion collision in the sheath. |