| Title |
Effects of Cooling Rate of Pre-heated Substrate on C-Axis Orientation of ZnO Prepared by RF Sputter Deposition |
| Authors |
박성현(Park, Sung-Hyun) ; 이능헌(Lee, Neung-Hun) |
| Keywords |
ZnO ; c-axis orientation ; RF magnetron sputter ; cooling rate ; substrate temperature |
| Abstract |
ZnO thin films were prepared by RF magnetron sputter deposition on p-Si(100) wafer with various cooling rates of substrate temperature such as the substrates were pre-heated to 400°C before the deposition and then cooled down naturally or slowly to 300°C, 200°C, 100°C, and R.T. by the temperature controller during the deposition. Crystalline and micro-structural characteristics of the films were investigated by XRD and SEM. ZnO films which cooled down naturally or slowly by the temperature controller during the deposition, especially the film were deposited with cooling down from 400°C to 200°C slowly. showed the most outstanding c-axis preferred orientation. |