| Title |
Design of Force Rebalance Loop for Silicon Accelerometer using Parametric Robust Control Technique |
| Authors |
성상경(Seong, Sang-Gyeong) ; 이장규(Lee, Jang-Gyu) ; 강태삼(Gang, Tae-Sam) |
| Keywords |
surface-micromachined ; silicon accelerometer ; force rebalance loop ; stability ; robustness |
| Abstract |
In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances. |