| Title |
A Study on the Precision Position Control for the Linear BLDC Motor |
| Authors |
전영한(Chun, Yeong-Han) ; 김지원(Kim, Ji-Won) ; 전진홍(Jeon, Jin-Hong) ; 전정우(Jeon, Jeong-Woo) ; 강도현(Kang, Do-Hyun) |
| Keywords |
BLDCM ; Position control ; stage process ; linearization ; thrust force ripple |
| Abstract |
The brushless DC motor(BLDCM) is widely used in many applications. One of the application of the BLDCM is the stage which is one of process in the semiconductor manufacturing processes. Very high performance is required in the stage process. In this paper, the 1 degree of freedom positioning system for the basic technology of the stage is studied. The linearization method is proposed to make the controller design procedures easy by measuring the thrust force ripple using the strain gauge. And through the experiments, it is proved that the inner velocity control loop is necessary to make more precise positioning control system. |