| Title |
Development of a Servo-system for Straightness Improvement of Linear Motor Stages |
| Authors |
최정덕(Choi Jeng Duk) ; 강민식(Kang Min Sig) |
| Keywords |
진직도 ; 전자기 엑츄에이터 ; 슬라이딩모드 제어 ; 마찰 Straightness ; Electro-magnetic Actuator ; Sliding Mode Control ; Friction |
| Abstract |
In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results. |