| Title |
Stable Atmospheric Plasma Generation at a Low Voltage using a Microstructure Array |
| Authors |
한성호(Han, Sung-Ho) ; 김영민(Kim, Young-Min) ; 김재혁(Kim, Jae-Hyeok) |
| Keywords |
멤스 ; 전기도금 ; 자가정렬 ; 방전 ; 플라즈마 MEMS ; Electroplating ; Self-aligned ; Discharge ; Plasma |
| Abstract |
A microstructure array has been proposed for micro plasma generation using electroplating and double exposed process. A stable atmospheric plasma has been generated at a low voltage by utilizing the micro electrode gap. Self-aligned microstructure can provide uniform electrode overlap with precisely controlled gap between the electrodes. The proposed structure allows for triode operation, which can expand the generated plasma over a large area by applying a lateral electric field. Electrical characteristics of the micro triode confirm the large numbers of the plasma ions are drifted to the secondary cathode by the lateral electrical field. |