Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
Title A Study on Characteristics of Angular Rate Sensor using Real Vehicle
Authors 김병우(Kim, Byeong-Woo)
Page pp.1218-1223
ISSN 1975-8359
Keywords electronic stability program ; angular rate sensor ; gyro ; MEMS ; vacuum packaging
Abstract A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.