| Title |
The Effect of Different Substrate Temperature on the Electrical Properties of Al-doped ZnO Thin Films |
| Authors |
김봉석(Kim, Bong-Seok) ; 김응권(Kim, Eung-Kwon) ; 이규일(Lee, Kyu-Il) ; 오수영(Oh, Su-Young) ; 송준태(Song, Joon-Tae) |
| Keywords |
Al-doped ZnO ; Substrate Temperature ; TCO |
| Abstract |
In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from 9.95×10^{-2} {Ω}-cm to 1.1×10^{-3} {Ω}-cm as a result of high substrate temperature and the average transmittances in visible range were above 80%. |