| Title |
A Study on the Sputtering System Using Ion Plating Technique |
| Authors |
정연호(Jeong, Yeon-Ho) ; 최영욱(Choi, Young-Wook) |
| Keywords |
Ion Plating ; FEM ; Sheet Plasma ; Sputtering |
| Abstract |
In this paper, to produce sheet plasma with high density for ion plating, we designed magnetic circuit of ion plating device consisting of solenoid coil and rectangular permanent magnet. And, we analyzed the effects of the magnetic field distribution using FEM (Finite Element Methode). Additionally, we made a sputtering system including ion plating technique on the basis of the design and verified the possibility of the sheet plasma application for advanced sputter system. |