• 대한전기학회
Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
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Title Surface Plasmon Resonance Based on ZnO Nano-grating Structure
Authors 김두근(Kim, Doo-Gun) ; 김선훈(Kim, Seon-Hoon) ; 기현철(Ki, Hyun-Chul) ; 김회종(Kim, Hwe-Jong) ; 오금윤(Oh, Geum-Yoon) ; 최영완(Choi, Young-Wan)
Page pp.922-926
ISSN 1975-8359
Keywords Surface plasmon resonance ; ZnO ; Nano-grating ; Biosensor
Abstract We have investigated the grating coupled surface plasmon resonance (GC-SPR) sensors using ZnO nano-grating structures to enhance the sensitivity of an SPR sensor. The GC-SPR sensors were analyzed using the finite-difference time-domain method. The optimum resonance angles of 49 degrees are obtained in the 150 nm wide grating structure with a period of 300 nm for the ZnO thickness of 30 nm. Then, the ZnO nano-grating patterns were fabricated by using laser interference lithography. The measured resonance angle of nano-grating patterns was around 49 degrees. Here, an enhanced evanescent field is obtained due to the surface plasmon on the edge of the bandgap when the ZnO grating structures are used to excite the surface palsmon.