| Title |
Physical and Electrical Properties of Nanocrystalline Carbon Films Prepared with Ti Concentration for Contact Strip Application of Electric Railway |
| Authors |
박용섭(Park, Yong-Seob) ; 정호성(Jung, Ho-Sung) ; 박철민(Park, Chul-Min) |
| DOI |
https://doi.org/10.5370/KIEE.2012.61.10.1561 |
| Keywords |
Contact strip of railway ; Magnetron sputtering ; Hardness ; Contact angle ; Surface roughness ; Resistivity |
| Abstract |
In this work, we have fabricated the nanocrystalline carbon films by using unbalanced magnetron sputtering method with graphite and Ti targets for contact strip application of electrical railway. The power density of graphite target was fixed and the power density was increased for the increase of Ti concentration in TiC films. We investigated the hardness, surface roughness, contact angle, resistivity, HRTEM and XPS of TiC films with Ti concentration. The hardness and resistivity were improved with increasing Ti concentration. These results indicate that the improvement of hardness and resistivity is related to the increase of sp2 clusters in TiC films. |