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Title Effects of Boron Concentration in ZnO:Al Seed Films on the Growth and Properties of ZnO Nanorods
Authors 마대영(Ma, Tae-Young) ; 박기철(Park, Ki-Cheol)
DOI https://doi.org/10.5370/KIEE.2017.66.10.1488
Page pp.1488-1493
ISSN 1975-8359
Keywords ZnO:Al films ; Zinc nanorods ; Hydrothermal ; Zinc nitrate hexahydrate ; Hexamethylenetetramine ; Photoluminescence
Abstract Boron-doped ZnO:Al films were deposited by rf magnetron sputtering. The structural and optical property variations of the films with the boron amounts were studied. ZnO nanorods were grown on SiO_2/Si wafers and glass by a hydrothermal method. ~50 nm-thick boron-doped ZnO:Al films were deposited on the substrates as seed layers. The mixed solution of zinc nitrate hexahydrate and hexamethylenetetramine in DI water was used as a precursor for ZnO nanorods. The concentration of zinc nitrate hexahydrate and that of hexamethylenetetramine were 0.05 mol, respectively. ZnO nanorods were grown at 90°C for 2 hours. X-ray diffraction was conducted to observe the crystallinity of ZnO nanorods. A field emission scanning electron microscope was employed to study the morphology of nanorods. Optical transmittance was measured by a UV-Vis spectrophotometer, and photoluminescence was carried out with 266 nm light. The ZnO nanorods grown on the 0.5 wt% boron-doped ZnO seed layer showed the best crystallinity.