| Title |
Electric Field Control by Guide Ring in Capacitively Coupled Plasma Electrode |
| Authors |
구교욱(Kyo-Woog Koo) ; 이연(Yeon-Lee) ; 구경완(Kyung-Wan Koo) |
| DOI |
https://doi.org/10.5370/KIEE.2019.68.11.1465 |
| Keywords |
CCP; Standing Wave; Skin Effect; VHF; Shadow Frame; Guide Ring; PECVD |
| Abstract |
In the case of display PECVD, VHF is introduced as the driving frequency. In addition, since the electrode shape has a large area rectangular structure, nonuniformity caused by the standing wave effect and skin effect occurs. In this case, even small changes in the process variables affect the nonuniformity. Against this we propose the electric field control method using guide ring as a part of reduction effect and fine tuning. Using the guide ring, the electrical influence and the optimization method were confirmed by the response surface Methodology and Taguchi experiment. It is considered that fine tuning is possible by utilizing the electrical properties of each factor. |