| Title |
Electrode Design and Evaluation for Capacitance of 50~500pF Variable Vacuum Capacitor |
| Authors |
차영광(Young-Kwang Cha) ; 이일회(Il-hoe Lee) ; 전기범(Ki-Beom Jeon) ; 장지훈(Ji-Hoon Jang) ; 주흥진(Heung-Jin Ju) |
| DOI |
https://doi.org/10.5370/KIEE.2022.71.2.406 |
| Keywords |
Variable vacuum capacitor; Impedance matching; AC withstand voltage; Capacitance; RF matcher |
| Abstract |
A variable vacuum capacitor (VVC) is used to match impedance between an RF generator and a plasma load for manufacturing semiconductor devices and display panels. However, VVC requires a very narrow gap between electrodes and a high degree of vacuum to implement high dielectric strength and capacitance variability at compact sizes. In addition, it is difficult to manufacture and maintain quality of the electrode unit, and is not easy to access to development due to the difficulty of the brazing process. For this reason, there are no VVC manufacturers in Korea yet, so it relies entirely on imports.
In this study, we designed and manufactured VVC with AC withstand voltage of 12 kV and capacitance of 50 to 500 pF, which are widely used in RF matchers, etc. As a result of the test, the required performance was confirmed, and the possibility of localization was verified. |