| Title |
A Simulation of the Energy Distribution Function for Electron in CF4, CH4, Ar Gas Mixtures |
| Keywords |
MCS(Monte Carlo Simulation) ; BEq(Boltzmann equation) |
| Abstract |
Energy Distribution Function in pure CH_4, CF_4 and mixtures of CF_4 and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in CF_4-Ar mixtures shows the Maxwellian distribution for energy. That is, f(varepsilon) has the symmetrical shape whose axis of symmetry is a most probably energy. The measured results and the calculated results have been compared each other. |