| Title |
Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Film |
| Authors |
이병수(Lee, Byoung-Soo) ; 이복희(Lee, Bok-Hee) ; 이덕출(Lee, Duch-Chool) |
| Keywords |
Pt ; TiN ; Pt-IrO_2 hybrid electrode ; Fatigue ; PZT |
| Abstract |
The effect of the Pt electrode and the Pt-IrO_2 hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a Pt-IrO_2 hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized Pt-IrO_2 hybrid electrode significantly enhanced the fatigue properties of the PZT thin film with minimal leakage current. |