| Title |
Analysis of the Mean Energy in SiH_4-Ar Mixture Gases |
| Keywords |
MCS(Monte Carlo Simulation) ; BEq(Boltzmann equation) ; TOF(Time Of Flight Method) ; PT(Pulse Townsent Method) ; STT(Steady State Townsent Method) |
| Abstract |
This paper calculates and gives the analysis of mean energy in pure SiH_4,;Ar-SiH_4 mixture gases (SiH_4-0.5[%],;5[%]) over the range of E/N =0.01{sim}300[Td], p = 0.1, 1, 5.0 [Torr] by Monte Carlo the Backward prolongation method of the Boltzmann equation using computer simulation without using expensive equipment. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for SiH_4 and Ar, were used. The differences of the transport coefficients of electrons in SiH_4, mixtures of SiH_4 and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients. |