| Title |
Development of a Multi-template type Image Segmentation Algorithm for the Recognition of Semiconductor Wafer 'ID' |
| Keywords |
Multiple Template ; NGC ; Dynamic Programming ; Segmentation ; OCR ; Image Inspection ; Wafer 'ID' |
| Abstract |
This paper presents a method to segment semiconductor wafer 'ID' on poor quality images. The method is based on multiple templates and normalized gray-level correlation (NGC) method. If the lighting condition is not so good and hence, we can not control the image quality, target image to be inspected presents poor quality 'ID' and it is not easy to 'ID'entify and then recognize the 'ID' characters. Conventional several method to segment the interesting 'ID' regions fails on the bad quality images. In this paper, we propose a multiple template method, which uses combinational relation of multiple templates from model templates to match several characters of the inspection images. To find out the optimal solution of multiple template model in 'ID' regions, we introduce newly-developed snake algorithm. Experimental results using images from real FA environment are presented. |