| Title |
Ionization and Attachment Coefficients in Mixtures of SF_6 and N_2 |
| Keywords |
Mixture gases ; Ionization coefficient ; Attachment coefficient ; Boltzmann equation |
| Abstract |
This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. SF_6 gas is widely used in industrial of insulation field. In this paper, N_2 is mixed to improve pure SF_6 gas characteristics. Electron transport coefficients in SF_6-N_2 mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results of this method. which are ionization coefficient, attachment coefficient, effective ionization coefficient, and critical E/N, can be important data to present characteristic of gas for insulation. Specially critical E/N is a data to evaluate insulation strength of a gas and is presented in this paper for various mixture ratios of SF_6-N_2 mixture gases. |