| Title |
The Analysis of SF_6/N_2 Plasma Properties Under the Atmosphere Pressure |
| Authors |
소순열(So, Soon-Youl) ; 이진(Lee, Jin) |
| Keywords |
Atmosphere Pressure ; SF_6/N_2 Plasmas ; Fluid Model ; Plasma Properties ; Mixture Gas |
| Abstract |
Atmosphere Plasmas of Gas Discharge (APGD) have been used in plasma sources for material processing such as etching, deposition, surface modification, etc. This study is to investigate and understand the fundamental plasma discharge properties. Especially, SF_6/N_2 mixed gas would be used in power transformer, GIS (Gas insulated switchgear) and so on. In this paper, we developed a one dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). 38 kinds of SF_6/N_2 plasma particles which are an electron, two positive ions ({SF_5}^+, {N_2}^+), five negative ions ({SF_6}^-, {SF_5}^-, {SF_4}^-, {F_2}^-, {F_1}^-), thirty excitation and vibrational particles for N_2 were considered in this computation. The N_2 gases of 20%, 50%, 80% were mixed in SF_6 gas. As the amount of N_2 gas was increased, the properties of electro-negative plasma moved toward the electro-positive plasma. |