| Title |
Analysis on DC Glow Discharge Properties of Ar Gas at the Atmosphere Pressure |
| Keywords |
Atmosphere Pressure ; DC Glow Discharge ; Fluid Model ; Plasma Simulation ; Argon Discharge |
| Abstract |
Atmosphere Plasma of Gas Discharge (APGD) has been used in plasma sources for material processing such as etching, deposition, surface modification and so on due to having no thermal damages. The APGD researches on AC source with high frequency have been mainly processed. However, DC APGD studies have been not. In order to understand APGD further, it is necessary to study on fundamental properties of DC APGD. In this paper, we developed a one-dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). Nine kinds of Ar discharge particles such as electron (e), positive ions (Ar^+, Ar_2^+) and neutral particles (Ar_m^*, Ar_r^*, Ar_h^*, Ar_2^*(1), Ar_2^*(3) and Ar gas) are considered in the computation. The simulation was worked at the current range of 1~15 [mA]. The characteristics of voltage-current were calculated and the structure of Joule heating were discussed. The spatial distributions of Ar DC APGD and the mechanism of power consumption were also investigated. |