| Title |
The Performance Modeling of a VGA Bolometer with Self-Aligned Structure |
| Keywords |
Bolometer Performance Modeling ; Self-Aligned Structure ; NETD ; Responsivity |
| Abstract |
The performance modeling of a 25{\mu}m pitch VGA {\mu}-bolometer with the self-aligned thermal resistor structure is carried out. The self-aligned thermal resistor can be utilized for the maximizing the thermal resistance and the fill factor of a bolometer, so the performance improvement can be expected. From the results of the performance modeling of the micro-bolometer with self-align thermal resistor for a 25{\mu}m pitch 640×480 microbolometer designed with 0.6{\mu}m minimum feature size, the drastic improvements of NETD from 38.7 mK to 19.1 mK, responsivity of 1.9 times are expected with a self aligned thermal resistor structure. The main reason for the performance improvements with a self-aligned thermal resistor structure comes from the increasement of the thermal resistance. |