| Title |
Ionization and Attachment Coefficients in CF4 |
| DOI |
https://doi.org/10.5370/KIEEP.2011.60.1.027 |
| Keywords |
Attachment Coefficients ; Boltzmann Equation(BEq) ; Drift Velocities ; Distribution Function ; Ionization Coefficients ; Monte Carlo Simulation(MCS) |
| Abstract |
In this paper, the electron transport characteristics in CF_4 has been analysed over the E/N range 1~300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The electron energy distribution function has been analysed in CF_4 at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas. |