Title |
The Drift Velocity of Electrons in CF4, CH4, Ar Mixtures Gas |
DOI |
https://doi.org/10.5370/KIEEP.2011.60.3.105 |
Keywords |
Drift Velocities ; Monte Carlo Simulation(MCS) ; Boltzmann Equation(BEq) |
Abstract |
Drift Velocity of Electrons in pure CF_4, CH_4 and mixtures of CF_4 and Ar. Have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in CF_4-Ar mixtures shows the Maxwellian distribution for energy. That is, f({\varepsilon}) has the symmetrical shape whose axis of symmetry is a most probably energy. The measured results and the calculated results have been compared each other. |