Mobile QR Code QR CODE : The Transactions P of the Korean Institute of Electrical Engineers
The Transactions P of the Korean Institute of Electrical Engineers

Korean Journal of Air-Conditioning and Refrigeration Engineering

ISO Journal TitleTrans. P of KIEE
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    Korea Citation Index(KCI)

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  3. 2023-12(Vol.72P No.04)
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Title Development of UV LED-based Light Source Device for Wafer Edge Exposure
Authors 백찬수(Chan-Soo Baek)
DOI https://doi.org/10.5370/KIEEP.2023.72.4.283
Page pp.283-288
ISSN 1229-800X
Keywords Edge bead; Edge exposure; Light source device; UV LED
Abstract In this paper, a UV LED-based light source device for wafer edge exposure was developed. In the light source device for edge exposure, a UV LED light source and a heat dissipation design for lens and heat dissipation are essential to improve light output concentration. As a result of the simulation according to the lens material and type, the use of three types of silicone lenses showed superior results than the use of glass lenses. In addition, an aluminum light source module was developed through experiments on various heat dissipation models. As a result of measuring the gray zone to evaluate the usefulness of the developed edge exposure light source module, it can be seen that it shows sufficient performance as an exposure light source. We intend to continuously evaluate reliability by installing a light source module for edge exposure developed in the future at the site.