| Title |
Evaluation of a Propulsion Force Coefficients for Transportation of Wafers in an Air Levitation System |
| Keywords |
Cleanroom ; 클린룸 ; Wafer ; 웨이퍼 ; Clean tube ; 클린튜브 ; Propulsion force coefficient ; 추진력계수 ; Air levitation ; 공기부상 ; Recovering ; 복원 ; Track ; 트랙 |
| Abstract |
The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well quantitatively. |