| Title |
Characteristics of Particle Deposition onto the Cleanroom Wall Panel with Electrostatic Voltages |
| Authors |
노광철(Kwang-Chul Noh) ; 손영태(Young-Tae Son) ; 김종준(Jong-Jun Kim) ; 오명도(Myung-Do Oh) |
| Keywords |
클린룸 ; 클린룸 벽체 ; 정전압 ; 입자침착 Cleanroom ; Cleanroom wall panel ; Electrostatic voltage ; Particle deposition |
| Abstract |
We carried out the experiments on particle deposition onto the cleanroom wall panels. And then we investigated the particle deposition characteristic coefficients for electrostatic voltages and particle size. It was found that there is little difference in characteristics of the particle deposition between the steel panel and the anti-static coating panel. In case of that the particle size is under 1.0m, the particle deposition characteristic coefficient becomes larger as the electrostatic voltage induced to the cleanroom wall panel is increasing. Where in case of that the particle size is over 3.0m, the particle deposition characteristic coefficients do not show any differences with the electrostatic voltages. It is due to that the electrostatic force is the major particle transport mechanism for submicron particles, while the gravitational settling is the major particle transport mechanism for overmicron particles when the electrostatic voltages are induced to the cleanroom wall panel. |