Title |
Effect of Inlet and Outlet Position on the Pumping Characteristics of a Diffuser/Nozzle Based Piezoelectric Micropumps |
Authors |
장훈희(Hun Hee Jang) ; 김창녕(Chang Nyung Kim) ; 정진(Jin Jung) |
Keywords |
압전형 마이크로 펌프 ; 압전 소자 ; 디퓨저/노즐 ; 박막 Piezoelectic micropump ; Piezo materials ; Diffuser/ Nozzle ; Membrane |
Abstract |
This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a flap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps. |