| Title |
Improving Vertical Airflow Uniformity Considering the Structures of the Lower Plenum in a Cleanroom |
| Authors |
김영섭(Young Sub Kim) ; 하만영(Man Yeong Ha) |
| Keywords |
클린룸 ; 하부 플레넘 ; 억세스 플로어 ; 개구율 ; 속도분포 ; 정압분포 Cleanroom ; Lower plenum ; Access floor ; Opening ratio ; Velocity profile ; Static pressure distribution ; |
| Abstract |
To achieve the unidirectional airflow in a cleanroom, we need to predict acc-urately the static pressure losses at the lower plenum and to control properly the opening pressure ratio of access floor panels based on these pressure losses. At first, the present study proposed a correlation to predict the velocity distribution at the lower plenum, because the accuracy to predict pressure losses at the lower plenum depends on how to calculate the velocity correctly against the inner structures at the lower plenum. In the second place, this study proposed correlations which considered the effect of inner structures such as columns, ducts and equipments at the lower plenum on pressure losses. In order to test the accuracy of these correlations, we compared air flow patterns before regulating the opening ratio of access floor with those after regulating. Results after regulating the opening ratio of access floor show good unidirectional uniform airflow pattern. So the present method can be used as an important tool to control the air flow in a cleanroom. |