| Title |
An Experimental Study on Semiconductor Process Chiller for Dual Channel |
| Authors |
차동안(Dong An Cha) ; 권오경(Oh Kyung Kwon) |
| Keywords |
챔버 ; 칠러 ; 듀얼채널 ; 에너지절감형 ; 반도체 ; 웨이퍼냉각 Chamber ; Chiller ; Dual channel ; Energy saving ; Semiconductor ; Wafer cooling ; |
| Abstract |
Excessive heat occurs during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant chamber-temperature and also wafertemperature in the chamber. Compared to an industrial chiller, semiconductor chiller’s power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficient chiller by optimizing operation control. Therefore, in this study, a semiconductor chiller is experimentally investigated to suggest energysaving direction by conducting load change, temperature rise and fall and control precision experiments. The experimental study shows the cooling capacity of dual-channel chiller rises over 30% comparing to the conventional chiller. The time and power consumption in the temperature rising experiment are 43 minutes and 8.4 kWh, respectively. The control precision is the same as ±1℃ at 0℃ in any cases. However, it appears that the dual channel’s control precision improves to ±0.5℃ when the setting temperature is over 30℃. |