| Title |
An Experimental Study on Energy Consumption of Air Washer Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms |
| Authors |
김기철(Ki-Cheol Kim) ; 김형태(Hyung-Tae Kim) ; 송근수(Gen-Soo Song) ; 유경훈(Kyung-Hoon Yoo) ; 손승우(Seung-Woo Son) ; 신대건(Dae-Kun Shin) ; 박덕준(Dug-Jun Park) |
| DOI |
http://dx.doi.org/10.6110/KJACR.2012.24.4.297 |
| Keywords |
에어와셔 외기공조시스템 ; 클린룸 ; 외기부하 ; 소비전력량 Air washer outdoor air conditioning system ; Clean room ; Outdoor air conditioning load ; Power consumption |
| Abstract |
In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 ㎥/h that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation. |